Title

Femtosecond Micro-Machining At Atmospheric Pressure Near Air-Ionization Threshold

Abstract

Femtosecond laser pulses produce very small features without modifying the surrounding bulk material. Femtosecond ablation at low pressures avoids unwanted nonlinear reactions with the surrounding atmosphere. No degradation of feature quality or reduction in ablation rate is observed as a result of air ionization.

Publication Date

1-1-2000

Publication Title

Conference on Lasers and Electro-Optics Europe - Technical Digest

Number of Pages

391-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0033696946 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0033696946

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