Title

Development Of Sputtering Systems For Large-Area Deposition Of Cuin1-XGaXSe1-YSY Thin-Film Solar Cells

Abstract

Optimum magnetic field distribution was obtained empirically by selectively removing nickel-coated soft iron pieces at the rear of the magnetron sputtering sources. In turn, the distribution resulted in a thickness uniformity of ±3% over central 10.2 cm length for molybdenum thin films. A completely modified magnetic array in which the magnetic field at the extremities was boosted by introducing strong magnets at and near the periphery, resulting in thickness uniformity for molybdenum of ±2.24% over 10.2 cm, ±2.4% over 12.7 cm, and ±2.95% over 15.2 cm; and zinc oxide, ±2.46% over 10.2 cm, ±3.84% over 12.7 cm, and ±5.6% over 15.2 cm.

Publication Date

7-1-2003

Publication Title

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volume

21

Issue

4

Number of Pages

1442-1446

Document Type

Article

DOI Link

https://doi.org/10.1116/1.1577128

Socpus ID

0042530456 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0042530456

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