Title

Microvalve For Sma-Based Chad

Keywords

Compact Hybrid Actuator Device (CHAD); Finite element analysis (FEA); MEMS valve; Shape Memory Alloy (SMA)

Abstract

This paper describes the development of a micro-machined passive check valve for an SMA-based compact hybrid actuator device (CHAD). The overall diameter of the valve is 12 mm and the thickness is 1 mm. The structure houses an array of 56 micro check valves. Each micro valve has a 250 μm diameter orifice covered by 10 μm thick nickel flap. Stoppers on each micro valves limit the displacement of the flaps during an opening. This design allows the Ni flaps to withstand high-pressure gradient created by the actuator while achieving high flow rate. A finite element analysis is used to characterize the static and dynamic behaviors of the valve flap for the prediction on flow rate. The prediction is found to be in good agreement with the experiment on static flow rate. The test results indicate that the flaps are able to withstand pressure difference of 0.28 MPa while achieving flow rate of 20 cc/sec. The valve also has low cracking pressure and reverse leakage.

Publication Date

11-26-2003

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5055

Number of Pages

300-306

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.483593

Socpus ID

0242720480 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0242720480

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