Title
Development Of 50 Mm Diameter Non-Polar Gallium Nitride Substrates For Device Applications
Abstract
We report the development of large 50 mm diameter free standing wafers of GaN. GaN layers up to 350 μm thick have been grown by HVPE on lattice-matched LiAlO2 substrates. The original oxide substrates were removed by wet chemical etching, and the defect structure of the GaN wafers has been investigated. The issue of stacking faults vs. polar inversion domains has been resolved in favor of ABABACAC stacking sequences. A UV-emitting LED (368 nm) has been developed on these substrates, using molecular beam epitaxy.
Publication Date
7-25-2003
Publication Title
Conference Proceedings - International Conference on Indium Phosphide and Related Materials
Number of Pages
567-570
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
Copyright Status
Unknown
Socpus ID
0037810733 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/0037810733
STARS Citation
Maruska, H. P.; Hill, D. W.; and Chou, M. M.C., "Development Of 50 Mm Diameter Non-Polar Gallium Nitride Substrates For Device Applications" (2003). Scopus Export 2000s. 1667.
https://stars.library.ucf.edu/scopus2000/1667