Title

Development Of Robust Microvalves For Large Flow Rate Robust Hydraulic Actuators

Abstract

A robust microvalve has been designed, fabricated and tested for large flow rate robust hydraulic actuators. The objectives for the hydraulic actuator, same for the microvalve, are challenging for MEMS based microvalves with large flow rate (10 cc/sec), large pressure support ability (up to 10 MPa) and able to operate at frequency (10 kHz). The designed microvalve meets all these requirements based on the simulation results with micro reinforced valve flap and a valve stopper. The flow rate of the microvalve tested is about 20 cc/sec under pressure of 50 psi and no damages identified during repeating tests.

Publication Date

7-23-2003

Publication Title

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Number of Pages

96-99

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0037818339 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0037818339

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