Title

Xenon Capillary Discharge Extreme-Ultraviolet Source Emitting Over A Large Angular Range

Abstract

We describe a capillary discharge source configuration, allowing for collection of extreme-ultraviolet (EUV) radiation at large off-axis angles, without the need for an EUV window. Operating with xenon gas, the source emits intensely within the EUV spectral region at 11.3 and 13.5 nm. When coupled with a high-collection-efficiency optical system, this source may be suitable for a number of high-averagepower EUV imaging applications. © 2001 Optical Society of America.

Publication Date

9-20-2001

Publication Title

Applied Optics

Volume

40

Issue

27

Number of Pages

4849-4851

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.40.004849

Socpus ID

0038299423 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0038299423

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