Title

Fabrication And Some Measurement Of A Digital Variable Optical Attenuator

Keywords

Assembly; Attenuation measurement; Electrodes; Mirrors; Optical attenuators; Optical device fabrication; Optical fiber networks; Optical sensors; Power amplifiers; Stimulated emission

Abstract

Arrays of sixteen micromirrors featuring 1 μm-wide structures have been fabricated based on SOI technology. Assembled prototypes can be actuated at about 70 V. Tilt angles, surface flatness, and some optical data of certain mirrors are measured.

Publication Date

1-1-2003

Publication Title

2003 IEEE/LEOS International Conference on Optical MEMS

Number of Pages

115-116

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/OMEMS.2003.1233493

Socpus ID

8844226397 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/8844226397

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