Title

Site-Specific Transmission Electron Microscope Characterization Of Micrometer-Sized Particles Using The Focused Ion Beam Lift-Out Technique

Keywords

Focused ion beam; Micrometer powder particles; Site-specific; Transmission electron microscope analysis of micrometer-sized particles; Transmission electron microscope specimen preparation; Transmission electron microscopy

Abstract

Micrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens may be obtained from particles and from regions which are smaller than the conventional ∼10-20 μm × 5 μm × ∼0.1 μm dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.

Publication Date

9-1-2001

Publication Title

Microscopy and Microanalysis

Volume

7

Issue

5

Number of Pages

418-423

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1017/S1431927601010418

Socpus ID

0000355331 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0000355331

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