Site-Specific Transmission Electron Microscope Characterization Of Micrometer-Sized Particles Using The Focused Ion Beam Lift-Out Technique
Focused ion beam; Micrometer powder particles; Site-specific; Transmission electron microscope analysis of micrometer-sized particles; Transmission electron microscope specimen preparation; Transmission electron microscopy
Micrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens may be obtained from particles and from regions which are smaller than the conventional ∼10-20 μm × 5 μm × ∼0.1 μm dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.
Microscopy and Microanalysis
Number of Pages
Source API URL
Lomness, Janice K.; Giannuzzi, Lucille A.; and Hampton, Michael D., "Site-Specific Transmission Electron Microscope Characterization Of Micrometer-Sized Particles Using The Focused Ion Beam Lift-Out Technique" (2001). Scopus Export 2000s. 191.