Title

Studies Of High-Repetition-Rate Laser Plasma Euv Sources From Droplet Targets

Abstract

The water droplet laser plasma source has been shown to have many attractive features as a continuous, almost debris-free source for extreme ultraviolet (EUV) and X-ray applications. Through a dual experimental and theoretical study, we analyze the interaction physics between the laser light and the target. The hydrodynamic laser plasma simulation code, Medusa103 is used to model the electron density distribution for comparison to electron density distributions obtained through Abel inversion of plasma interferograms. In addition, flat field EUV spectra are compared to synthetic spectra calculated with the atomic physics code RATION.

Publication Date

1-1-2003

Publication Title

Applied Physics A: Materials Science and Processing

Volume

77

Issue

2

Number of Pages

217-221

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1007/s00339-003-2142-4

Socpus ID

0038346611 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0038346611

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