Title

Design And Fabrication Of Meso-Scale Variable Capacitance Motor For Miniature Heat Pumps

Abstract

Miniaturization of the heat pump in the meso-scale power domain requires the development of the compressor integrated actuation units in the millimeter range. In this respect, a variable capacitance motor (VCM) is considered for compressor actuation. This work describes the design of a three-phase VCM. A microfabrication technique has been applied for the implementation of the motor using silicon technology. Some static electrical measurements have been conducted for the fabricated motor.

Publication Date

1-1-2003

Publication Title

Journal of Micromechanics and Microengineering

Volume

13

Issue

1

Number of Pages

1-7

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0960-1317/13/1/301

Socpus ID

0037236087 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0037236087

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