Title

Wet Chemical Etching Of Ligao2 And Lialo2

Abstract

The effects of temperature and wet chemical etching solution on the etch rate LiGaO2 and LiAlO2 were investigated. The solutions studied were H2SO4, H3PO4, and HCl. Etch rates from 500 to 73,000 Å/min and 100 to 9,500 Å/min were obtained for LiGaO2 and LiAlO2, respectively. Arrhenius plots were used to examine the rate-limiting step for each etchant.

Publication Date

6-1-2001

Publication Title

Electrochemical and Solid-State Letters

Volume

4

Issue

6

Number of Pages

-

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1149/1.1368737

Socpus ID

0035383689 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0035383689

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