Title

Integration Of Microbolometers With Infrared Microstrip Antennas

Keywords

Infrared antenna; IR detector; Microbolometer; Microstrip dipole

Abstract

We report on various integration schemes of infrared microbolometers with microstrip antennas. The first integration design consists of two gold (Au) rectangular microstrip patches coupled along the radiating edges by a narrow niobium (Nb) strip. Devices using silicon oxide are compared to devices using amorphous silicon as antenna substrate. An extension of the twin-patch detector design is the microstrip dipole antenna-coupled microbolometer. Two ways of connecting the device to the contact pads via narrow dc leads are presented and compared. The contribution of the dc leads to the detector response is eliminated by directly connecting the dipole to the contact pads. The thermal isolation of the microbolometer from the silicon wafer is improved by incorporating air into the antenna dielectric substrate. This leads to higher detector responsivity and shifts the resonance towards longer antennas. The implementation of a bridge microstrip dipole antenna structure is also discussed. © 2002 Elsevier Science B.V. All rights reserved.

Publication Date

12-1-2002

Publication Title

Infrared Physics and Technology

Volume

43

Issue

6

Number of Pages

335-344

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/S1350-4495(02)00123-8

Socpus ID

0036887412 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0036887412

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