Title

Micro-Electro-Mechanical System-Based Digitally Controlled Optical Beam Profiler

Abstract

An optical beam profiler is introduced that uses a two-dimensional (2-D) small-tilt micromirror device. Its key features include fast speed, digital control, low polarization sensitivity, and wavelength independence. The use of this 2-D multipixel device opens up the important possibility of realizing several beam profile measurement concepts, such as a moving knife edge, a scanning slit, a moving pinhole, a variable aperture, and a 2-D photodiode array. The experimental proof of the optical beam profiler concept using a 2-D digital micromirror device to simulate the 2-D moving knife edge indicates a small measurement error of 0.19% compared with the expected number based on a Gaussian beam-propagation analysis. Other 2-D pixel arrays such as a liquid-crystal-based 90 polarization rotator sandwiched between crossed polarizers can also be exploited for the optical beam whose polarization direction is known. © 2002 Optical Society of America.

Publication Date

6-20-2002

Publication Title

Applied Optics

Volume

41

Issue

18

Number of Pages

3506-3510

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.41.003506

Socpus ID

0037141927 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0037141927

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