Title

The Effects Of Oxidation On The Optical Properties Of Amorphous Sic Films

Keywords

Amorphous silicon carbide films; Optical properties; Oxidation

Abstract

Amorphous silicon carbide films were deposited by the r.f. sputtering technique using a SiC target. The deposited films were annealed in dry oxygen ambient in the temperature range of 400-700 °C. Optical absorption studies indicated blue shifting effects as the annealing temperature was increased. © 2002 Elsevier Science B.V. All rights reserved.

Publication Date

3-7-2002

Publication Title

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volume

90

Issue

1-2

Number of Pages

47-49

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/S0921-5107(01)00827-3

Socpus ID

0037034693 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0037034693

This document is currently not available here.

Share

COinS