Title

Using Carbon Nanotube Cantilevers In Scanning Probe Metrology

Abstract

Carbon nanotubes (CNT) are among the candidates for atomic force microscopy probes for use in high aspect ratio critical dimension metrology (CDM). Their mechanical strength at small diameters makes them ideal probes for narrow and deep features. The synthesis of CNT has been making great progress in recent years. The use of CNT in scanning probe microscopy, however, has been limited due to a number of problems. While the CNT probes generally appear to be long lasting, the manufacture of precisely aligned CNT of defined length, diameter and number of walls poses a number of challenges. Yet, such precisely defined CNT probes seem to be required if the cantilevers are to be used for CDM. Our results demonstrate, for example, that the attachment angle of CNT with respect to the cantilever beam is crucial for their application in CDM. We report about our efforts to overcome these problems by growing well-defined CNT on standard Si cantilevers using chemical vapor deposition (CVD) in combination with focused ion-beam (FIB) machining techniques. © 2002 SPIE · 0277-786X/02/$15.00.

Publication Date

1-1-2002

Publication Title

Proceedings of SPIE-The International Society for Optical Engineering

Volume

4689 I

Number of Pages

53-57

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.473496

Socpus ID

0141618921 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0141618921

This document is currently not available here.

Share

COinS