Title

Fib Damage In Silicon: Amorphization Or Redeposition?

Publication Date

1-1-2002

Publication Title

Microscopy and Microanalysis

Volume

8

Issue

SUPPL. 2

Number of Pages

50-51

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1017/s1431927602101577

Socpus ID

0036409109 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0036409109

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