Title

Antenna-Coupled Microbolometers On A Silicon-Nitride Membrane

Keywords

Antenna-coupled detectors; Microbolometers; Responsivity; Silicon nitride membrane; Thermal impedance

Abstract

Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and under vacuum, giving D* values of 3 × 10 6 cm√Hz/W and 1.7 × 10 7 cm√Hz/W, respectively. By using vanadium-oxide, values well above 1 × 10 8 cm√Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. © 2005 Wiley Periodicals, Inc.

Publication Date

12-20-2005

Publication Title

Microwave and Optical Technology Letters

Volume

47

Issue

6

Number of Pages

546-548

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1002/mop.21226

Socpus ID

30544446195 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/30544446195

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