Title
Fib Lift-Out Specimen Preparation Techniques Ex-Situ And In-Situ Methods
Keywords
Ex-situ LO; EXLO; FIB; Focused ion beam; In-situ LO; INLO; Lift-out; LO; Micromanipulation; TEM
Abstract
In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented. © 2005 Springer Science+Business Media, Inc.
Publication Date
12-1-2005
Publication Title
Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice
Number of Pages
201-228
Document Type
Article; Book Chapter
Personal Identifier
scopus
DOI Link
https://doi.org/10.1007/0-387-23313-X_10
Copyright Status
Unknown
Socpus ID
84892353296 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84892353296
STARS Citation
Giannuzzi, L. A.; Kempshall, B. W.; and Schwarz, S. M., "Fib Lift-Out Specimen Preparation Techniques Ex-Situ And In-Situ Methods" (2005). Scopus Export 2000s. 3093.
https://stars.library.ucf.edu/scopus2000/3093