Title

Fib Lift-Out Specimen Preparation Techniques Ex-Situ And In-Situ Methods

Keywords

Ex-situ LO; EXLO; FIB; Focused ion beam; In-situ LO; INLO; Lift-out; LO; Micromanipulation; TEM

Abstract

In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented. © 2005 Springer Science+Business Media, Inc.

Publication Date

12-1-2005

Publication Title

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Number of Pages

201-228

Document Type

Article; Book Chapter

Personal Identifier

scopus

DOI Link

https://doi.org/10.1007/0-387-23313-X_10

Socpus ID

84892353296 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84892353296

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