Title

Review Of Rapid Thermal Process And Setup For Fabrication Of Absorber Layer For Cigss Solar Cells By Rtp

Abstract

Rapid thermal processing (RTP), originally developed for processing microelectronic devices has been investigated during the last decade for its potential in the production of solar cells. Over the years, RTP has become essential to the manufacturing of advanced semiconductors, where it is used for oxidation, annealing, silicide formation and deposition. Advanced solar cell fabrication requires thermal budget minimization to restrict dopant diffusion. RTP systems can process large substrates without compromising process uniformity or ramp rates. Thus, RTP can be utilized to minimize the process time cycle in CuIn1-xGaxSe2-ySy (CIGSS) module fabrication. FSEC PV Materials Lab has developed excellent facilities for the preparation of CIGSS thin-film solar cells. A RTP reactor for preparation of CIGSS thin films on 10 cm x 15 cm substrates has been designed at the FSEC PV Materials Lab. This paper describes the preparation and characterization of CIGSS thin-film solar cells by RTP technique.

Publication Date

12-1-2005

Publication Title

Proceedings of the Solar World Congress 2005: Bringing Water to the World, Including Proceedings of 34th ASES Annual Conference and Proceedings of 30th National Passive Solar Conference

Volume

2

Number of Pages

1055-1059

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84870497699 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84870497699

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