Title

Novel Electrostatic Discharge Protection Structure For A Monolithic Gas Sensor Systems-On-A-Chip

Abstract

A new on-chip Electrostatic Discharge (ESD) protection scheme is demonstrated for MicroElectroMechanical Systems (MEMS)- based Embedded Sensor (ES) System-on-a-Chip (SoC). The ESD protection scheme includes ground-referenced protection cells implemented with novel multifinger thyristor-type devices for 1) the Input/Output (I/O) protection, 2) the power supply clamp, and 3) the protection at the internal sensors' electrodes. The I-V characteristics of the thyristor-type protection cells are adjusted for providing an optimum ESD protection per unit area. Transmission Line Pulsing (TLP) measurements and ESD testing show superb high conductance on-state I-V characteristics with no latch-up problem when thyristor-type devices are subjected to an ESD event, while very low leakage current is obtained at the SoC operating voltage. © 2005 IEEE.

Publication Date

12-1-2005

Publication Title

Proceedings - IEEE International Symposium on Circuits and Systems

Number of Pages

416-419

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ISCAS.2005.1464613

Socpus ID

50249170570 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/50249170570

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