Experimental And Predicted Tcf And Saw Parameters On Lgt [0° 132° Φ] Substrates


The recent investigations of LGT have shown that it has several attractive properties in comparison to quartz, such as higher electromechanical coupling, lower phase velocity and possibility of operating at higher temperatures. It has been previously shown that LGT with Euler angles [0°, 132°, 31°] has a turnover temperature of approximately 135°C [1], which is a desirable property for devices working at relatively high temperatures, such as sensors. In this work, characterization of the LGT [0°132° φ] was performed, versus propagation angle and electrode metallization, to explore its use at elevated operating temperatures. Theoretical predictions of LGT SAW temperature behavior have been previously made from extracted temperature coefficient constants made around room temperature. In this work, scattering parameters are measured over temperature utilizing on wafer RF probing. The temperature fractional frequency variation (Δf/fo) and temperature coefficient of frequency (TCF), power flow angle, coupling and velocity for various propagation angles of LGT on the plane with Euler angles [0°, 132°, φ] are presented The results show a fairly large variation of turnover temperature, in the range of 70°C to 200°C, as well as variation of other important SAW parameters. Finally, several SAW resonators were analyzed and designed using the extracted SAW material parameters in a COM model A comparison of the predicted and measured device performance is made and shows good correlation. Three different types of metallization were used in SAW resonators: (1) regular Al electrodes; (2) the sandwiched metal layered type, which includes titanium, copper, aluminum and gold; and (3) platinum over zirconium. Measured results of the various devices and parameters will be presented and compared to predictions. © 2005 IEEE.

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Proceedings - IEEE Ultrasonics Symposium



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Article; Proceedings Paper

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33847130027 (Scopus)

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