Title

Development Of Self-Assembled Robust Microvalves With Electroform Fabricated Nano-Structured Nickel

Keywords

High frequency; High pressure support; Microvalve; Nano-structured nickel; Self-assemble

Abstract

Self-assembled robust micro check valves with large flow rates (>10 cc/second, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single micro valves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Self-assembling was realized by guiding the electroforming process during the fabrication process. Test results show that the forward flow rate is about 19 cc/second under pressure of 90Psi. The backward flow rate is negligible. The reliability of the valve was tested by a specific loading/unloading sequence. Results show that the flow rates were repeated very well over a large range of tested pressure differences.

Publication Date

12-1-2005

Publication Title

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Number of Pages

479-482

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

32144457201 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/32144457201

This document is currently not available here.

Share

COinS