Title

Micromachined Nanocrystalline Silver Doped Tin Oxide Hydrogen Sulfide Sensor

Keywords

MEMS; Nanocrystalline SnO 2; SMO; SWNT Sol Gel

Abstract

We report here an ultra high sensitive hydrogen sulfide micromachined gas sensor based on SnO2-Ag gas sensing material was fabricated on ceramic wafer and quartz wafer. A polymeric sol-gel process has been successfully developed in fabricating thin film SnO2-Ag nanocomposite, which shows excellent sensing characteristics upon exposure to as low as 1 ppm concentrations of H2S at low working temperature of 70C. This sensor shows ultra high sensitivity to H2S even at extreme (both dry and wet) humidity conditions compared to published results and testing commercial H2S sensors. SEM was used to investigate surface morphology and crystalline of the film. Selectivity of this gas sensor was studied with comparison with several commercial H2S sensors; the result shows that this sensor is less sensitive to common interference gases like Cl2, HCl, SO2, C6H14, CH 4, CO, C3H8 etc. which may cause false alarm in real applications.

Publication Date

12-1-2005

Publication Title

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Number of Pages

301-305

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

32144444540 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/32144444540

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