Title

Radiation Transport Modeling For Xe And Sn-Doped Droplet Laser-Plasma Sources

Keywords

EUV; Laser-plasmas; Sources; Tin plasmas modeling; Xe sources

Abstract

Detailed understanding of the complex UTA emission from Xe and Sn laser plasmas is imperative to the development of efficient 13.5 nm sources for EUVL. We are developing a comprehensive theoretical modeling approach to these sources, utilizing state-of-the-art hydrodynamic and radiation transport plasma codes. These models are specifically applied to Xe and Sn-doped microscopic droplet targets laser-plasmas irradiated with nanosecond laser pulses. The plasma expansion models are compared to experimental determinations of the plasma electron density distributions. The output of the radiation transport code is used to interpret details of the spectral emission measured from these plasmas over a broad range of parameters.

Publication Date

9-19-2005

Publication Title

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volume

5751

Issue

II

Number of Pages

769-778

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.596767

Socpus ID

24644498105 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/24644498105

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