Title

Euv Spectroscopy Of Mass-Limited Sn-Doped Laser Microplasmas

Keywords

EUV; Laser-plasmas; Sources; Tin plasmas; Xe sources

Abstract

The 13 nm emission that results from laser plasmas created from tin targets, results from a milliard of transitions occurring in many ions of tin (Sn 6+ - Sn 13+). Understanding the energy manifolds within these multiple states will further our ability to manipulate energy into the narrow emission band demanded by EUV Lithography. A combined experimental theoretical program is underway to measure and interpret the detailed EUV emission spectra from laser plasmas suitable for EUVL, particularly mass-limited droplet laser plasmas. We employ high resolution spectroscopy in the 2 - 60 nm wavelength regions to characterize the emission from the plasma. This is interpreted with the aid of combined hydrodynamic/ radiation transport computer models. The results of this study will have impact on the in-band EUV conversion efficiency, estimation of the out-of-band short-wavelength emission, and in the development of electron temperature plasma diagnostics.

Publication Date

9-19-2005

Publication Title

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volume

5751

Issue

II

Number of Pages

779-788

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.596781

Socpus ID

24644446384 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/24644446384

This document is currently not available here.

Share

COinS