Title

Cad-Integrated System For Automated Multi-Photon Three-Dimensional Micro- And Nano-Fabrication

Keywords

Micro-electromechanical systems (MEMS); Micro-fluidics; Micro-optical systems; Multi-photon three-dimensional microfabrication; Photolithography

Abstract

Multi-photon three-dimensional micro-/nano-fabrication (3DM) is a powerful technique for creating complex 3D micro-scale structures of the type needed for micro-electromechanical systems (MEMS), micro-optics, and microfluidics. In 3DM high peak-power laser pulses are tightly focused into a medium which undergoes a physical or chemical change following multi-photon excitation at the focal point. Complex structures are generated by serial 3D-patterned exposure within the material volume. To further the application of 3DM to micro-component engineering, we are developing a fully automated and integrated 3DM system capable of creating complex cross-linked polymer structures based on patterns designed in a CAD environment. The system consists of four major components: (1) a femtosecond laser and opto-mechanical system; (2) 3-axis micro-positioner; (3) a computer-controlled fabrication interface; and (4) software for fabrication-path planning. The path-planning software generates a 3DM command sequence based on an object-design input file created using standard commercial CAD software. The 3DM system can be used for start-to-finish design and fabrication of waveguides, 3D photonic crystals, and other complex micro-structures. These results demonstrate a technological path for implementing 3DM as a tool for micro- and nano-optical component manufacture.

Publication Date

7-21-2005

Publication Title

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volume

5720

Number of Pages

196-203

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.601187

Socpus ID

21844468973 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/21844468973

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