Title

Development Of Large Flow Rate, Robust, Passive Micro Check Valves For Compact Piezoelectrically Actuated Pumps

Keywords

Electroforming; High frequency; High pressure; Hydraulic actuator; Large flow rate; Microvalve and array

Abstract

A robust passive high frequency high pressure micro check valve was developed for piezoelectrically actuated pumps. A novel cross-patterned microvalve flap is used to increase the valve's structural stiffness with pressures up to 10 MPa. A mechanical valve stopper prevents valve-flap failure under extreme high pressure. The valve-flap is also designed to work at frequency larger than 10,000 Hz. The valve-flap was fabricated with electroformed nickel on silicon substrate. Deep RIE etching was used to fabricate the valve channels in the silicon substrate. The whole valve weighs 0.2 g including packaging. The microvalve flow rate (water) is measured to be 18 cm 3/s under a pressure difference of 50psi. The microvalve was integrated with a compact piezoelectric pump and produced pressure of 350psi when operated at 10 kHz frequency. © 2004 Elsevier B.V. All rights reserved.

Publication Date

1-14-2005

Publication Title

Sensors and Actuators, A: Physical

Volume

117

Issue

2

Number of Pages

325-330

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.sna.2004.06.029

Socpus ID

69749112714 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/69749112714

This document is currently not available here.

Share

COinS