Title
Water Vapor Enhancement For Elemental Analysis Using Focused Ion Beam Secondary Ion Mass Spectrometry (Fib-Sims)
Abstract
Secondary Ion Mass Spectrometry (SIMS) with a quadrupole detector has been used on FIB systems but it needs yields enhancement to become an effective tool. By introducing water vapor to the area of analysis, the secondary ion yield can be significantly increased for certain metals.
Publication Date
12-1-2001
Publication Title
Conference Proceedings from the International Symposium for Testing and Failure Analysis
Number of Pages
281-284
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
Copyright Status
Unknown
Socpus ID
1542270704 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/1542270704
STARS Citation
Shofner, T. L.; Stevie, F. A.; and McKinley, J. M., "Water Vapor Enhancement For Elemental Analysis Using Focused Ion Beam Secondary Ion Mass Spectrometry (Fib-Sims)" (2001). Scopus Export 2000s. 43.
https://stars.library.ucf.edu/scopus2000/43