Title

A Nanoparticle-Based Microsensor For Room Temperature Hydrogen Detection

Keywords

Hydrogen sensor; Microsensor; Nanoparticle

Abstract

In this work, we report a novel micromachined hydrogen sensor operating at room temperature. The sensor has been successfully designed and fabricated based on interdigitated conductometric microelectrodes integrating indium oxide (In2O3-doped tin oxide (SnO2) semiconductor nanocrystalline particles with platinum (Pt) nanoclusters. Very high H 2 sensitivity (110 × 103) with fast response and recovery has been observed for the present sensor at room temperature and low hydrogen gas concentration. The nanomaterial/microdevice integration for a highly efficient sensor device with unprecedented functions has been explored and investigated systematically. © 2004 IEEE.

Publication Date

12-1-2004

Publication Title

Proceedings of IEEE Sensors

Volume

1

Number of Pages

395-398

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

27944475981 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/27944475981

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