Title

Integrated Electro-Optic Mach-Zehnder Switch Realized By Zinc In-Diffusion

Keywords

Electro-optic switches; Integrated optics; Multiple quantum wells; Photonic integrated circuits; Semiconductor switches

Abstract

We demonstrate the use of an area selective zinc in-diffusion technique to fabricate an integrated InP/InGaAsP Mach-Zehnder optical switch. The zinc in-diffusion process using a semi-sealed open-tube diffusion furnace was characterized to enable the creation of p-n junctions at a precise depth in selected areas of the device sample. The method is simple, yet highly controllable and reproducible; with the crystal quality remaining intact after the diffusion process is complete. Using this technique an integrated 1×2 Mach-Zehnder optical switch has been fabricated. Our preliminary devices show a switch contrast ratio of 12 dB with a voltage swing of ±2.5 volts. Improving our fabrication process will further optimize the performance of the switch. Nevertheless, very good electrical isolation is obtained between the contacts, which demonstrates the potential of the technique for the fabrication of Photonic Integrated Circuits.

Publication Date

12-1-2004

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5622

Issue

PART 2

Number of Pages

833-837

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.590829

Socpus ID

17644421788 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/17644421788

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