Title

Micromachined Nanocrystalline Sno2 Chemical Gas Sensors For Electronic Nose

Keywords

Electronic nose; MEMS; Nanocrystalline SMO; Sol-gel

Abstract

MEMS-based batch fabrication compatible sol-gel synthesized mesoporous nanocrystalline SnO2 gas sensor has been developed. The SnO 2 nanofilm is fabricated with the combination of polymeric sol-gel chemistry and block copolymers used as structure directing agents. The novel hydrogen sensor has a fast response time (2s) and quick recovery time (10s), as well as good sensitivity (up to 90), in comparing to other hydrogen sensors developed. The working temperature of the sensor developed can be reduced as low as 100°C. The low working temperature poses advantages such as lower power consumption; lower thermal induced signal shift as well as safe detection in certain environments where temperature is strictly limited. The nanocrystalline SnO2 sensor has a broad sensitivity. The developed sensor cell will be used to develop a high sensitivity and high selectivity electronic nose for harmful chemical gas detection by combining different catalysts doped SnO 2 gas sensor array with fuzzy neural network. © 2004 Elsevier B.V. All rights reserved.

Publication Date

9-1-2004

Publication Title

Sensors and Actuators, B: Chemical

Volume

102

Issue

1

Number of Pages

117-125

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.snb.2004.02.055

Socpus ID

4344601824 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/4344601824

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