Title

The Application And Validation Of A New Robust Windowing Method For The Poisson Yield Model

Abstract

In this paper, a simple robust method of extracting the systematic and random components of yield is presented. The method has proven to be robust in its implementation in systems to automate the analysis of wafer probe bin map data spanning several years for multiple cleanrooms and technologies. The method's ability to detect systematic yield loss is evaluated and its dependence on die size is discussed. The application of data sub-setting to the results, which allows focused analysis of yield problems, is shown to be effective.

Publication Date

1-1-2001

Publication Title

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volume

2

Number of Pages

157-160

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ASMC.2001.925640

Socpus ID

0035182907 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0035182907

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