Title

A Silicon-On-Insulator Based Micro Check Valve

Abstract

In this paper we present a bulk micromachined check valve with very high frequency and extremely low leak rates. The valve is designed to have a hexagonal orifice, a hexagonal membrane flap and three flexible tethers. The three elbow-shaped flexible tethers are used to secure the membrane flap to the valve seat and to obtain large flap displacement in the forward flow direction. A silicon-on-insulator wafer and deep reactive ion etching technology are used to implement this microvalve. A very simple fabrication process has been developed, and only two photolithographic masks are required. Preliminary fluidics testing on a 1.44 mm size check valve was performed. A maximum flow rate (deionized water) of 35.6 ml min -1 was obtained at a forward pressure of 65.5 kPa, and only negligible leakage rate was observed at a reverse pressure of up to 600 kPa. The frequency response of the valve in air was also measured and its first resonance frequency was found at 17.7 kHz.

Publication Date

3-1-2004

Publication Title

Journal of Micromechanics and Microengineering

Volume

14

Issue

3

Number of Pages

382-387

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0960-1317/14/3/010

Socpus ID

1642634567 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/1642634567

This document is currently not available here.

Share

COinS