Title

Spectroscopic Studies Of The Sn-Based Droplet Laser Plasma Euv Source

Keywords

EUV; Laser-plasmas; Sources; Tin plasmas

Abstract

We have previously reported encouraging results with a new type of laser plasma source. As a radiation source at 13.5nm spectral band, tin has several advantages over xenon, not the least of which is the number of ion species within the plasma that contribute to the in-band emission. In this paper we report results from spectroscopic measurements of the laser plasma emission from 12 - 19nm from this target, together with hydrodynamic code simulations of the source, towards developing a suitable laser plasma source for EUV lithography.

Publication Date

8-18-2004

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5374

Issue

PART 2

Number of Pages

964-970

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.541575

Socpus ID

3843107901 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/3843107901

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