Title

Presculpting Of Photoresists Using Additive Lithography

Keywords

Additive lithography; Beam shaping; Micro optics; Pre sculpting; Reflow; Refractive optics

Abstract

In this paper we present the fabrication of refractive micro optical elements by additive sculpting of the photoresist using binary amplitude masking techniques. We also present the fabrication of micro optical elements by pre sculpting the photoresist before reflow. This enables the use of fewer masking patterns while allowing us to obtain smooth profiles on the resist. The resist can be pre sculpted into any shape by using a set of binary patterns thus allowing us to fabricate refractive beam shaping elements.

Publication Date

5-10-2004

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5347

Number of Pages

85-94

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.538385

Socpus ID

2142839732 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/2142839732

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