Title

Fabrication Of Passively Aligned Micro-Optics Using Focused Ion Beam

Keywords

FIB; Focused Ion beam; Micro optics; Subtractive Milling; v-groove

Abstract

Integration of micro-optical elements presents numerous challenges to the optical engineer in both fabrication and integration schemes. Therefore, prototyping integrated micro-optics is somewhat prohibitive due to cost and complexity. In this paper, we present a novel technique based on a subtractive milling process for Focused Ion Beam (FIB) milling of micro-optics into semiconductor devices. Results are presented for an integrated micro-lens in a silicon v-groove turning mirror for a passively aligned optical element.

Publication Date

5-10-2004

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5347

Number of Pages

205-214

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.522067

Socpus ID

2142789257 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/2142789257

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