Title
Non-Contact No-Moving Parts Surface Height Measurement Sensor Using Liquid Crystal-Based Axial Scanning Confocal Optical Microscopy
Keywords
Confocal microscopy; Height measurements; Instrumentation, measurement, and metrology; Liquid crystals; Scanning microscopy
Abstract
An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 μm continuous range optical height measurement sensor used to characterize a 2.3 μm height Indium Phosphide twin square optical waveguide chip.
Publication Date
11-15-2007
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume
6572
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1117/12.717834
Copyright Status
Unknown
Socpus ID
35949001702 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/35949001702
STARS Citation
Riza, Nabeel A.; Khan, Sajjad A.; and Sheikh, Mumtaz, "Non-Contact No-Moving Parts Surface Height Measurement Sensor Using Liquid Crystal-Based Axial Scanning Confocal Optical Microscopy" (2007). Scopus Export 2000s. 6253.
https://stars.library.ucf.edu/scopus2000/6253