Title
Finesse Of Silicon-Based Terahertz Fabry-Perot Spectrometer
Keywords
Bragg mirror; Etching; Fabry-perot; Far-IR; Millimeter wave; Terahertz
Abstract
This paper considers factors that affect achievable finesse for a recently demonstrated silicon-based scanning FabryPerot transmission filter at millimeter and sub-millimeter wavelengths. The mirrors are formed by alternating quarterwave optical thicknesses of silicon and air in the usual Bragg configuration. Fundamental loss by lattice and free carrier absorption are considered. Technological factors such as surface roughness, bowing, and misalignment are considered for various proposed manufacturing schemes.
Publication Date
11-15-2007
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume
6549
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1117/12.719577
Copyright Status
Unknown
Socpus ID
35948978143 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/35948978143
STARS Citation
Geary, Justin W.; Peale, Robert E.; Todi, Ravi; Sundaram, Kalpathy; and Edwards, Oliver, "Finesse Of Silicon-Based Terahertz Fabry-Perot Spectrometer" (2007). Scopus Export 2000s. 6260.
https://stars.library.ucf.edu/scopus2000/6260