Title

Expected Response Times For Closed-Loop Multivehicle Amhs

Keywords

Markov chains; Material handling systems; Semiconductor fabs

Abstract

We present an analytical approach for estimating the expected time for an automated material handling system (AMHS) to respond to move requests at loading stations in a vehicle-based, unidirectional, closed-loop AMHS. The expected response times are important for estimating the expected work-in-process (WIF) levels at the loading stations for design purposes, and for evaluating the performance of the AMHS as delayed response can impact the production cycle times. The expected response time approximation is validated by comparing the analytical model to the simulation results using a SEMATECH 300 mm hypothetical fab data set. © 2007 IEEE.

Publication Date

10-1-2007

Publication Title

IEEE Transactions on Automation Science and Engineering

Volume

4

Issue

4

Number of Pages

533-542

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/TASE.2007.906141

Socpus ID

35348906323 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/35348906323

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