Title

Mechanical Properties Of Au Films On Silicon Substrates

Keywords

Au; Hardness; Mechanical property; Microstructure; Modulus; Silicon; Substrate; Thin films

Abstract

This paper presents the results of recent studies of the effects of film thickness on the mechanical properties of electron-beam (e-beam) deposited Au films on silicon substrates. Following a brief description of film microstructure and surface topography, film mechanical properties (Young's modulus and hardness) are determined using nanoindentation techniques. The effects of stiff silicon substrates on the Young's modulus are analyzed within the framework established by King [6, 8]. The effects of indentation size on film hardness are also explained within the context of strain gradient plasticity theories and substrate effects. The plasticity length scale parameters are shown to scale with film thickness. The amount of material pile up is also shown to increase with decreasing film thickness, for a given ratio of indentation depth to film thickness. The implications of the work are discussed for applications of Au films on silicon substrates.

Publication Date

2-1-2007

Publication Title

Materials and Manufacturing Processes

Volume

22

Issue

2

Number of Pages

187-194

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1080/10426910601062271

Socpus ID

33847214562 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33847214562

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