Title

Development Of Robust Microvavles For Compact Robust Pumps/Hydraulic Actuators

Keywords

Large flow rate; Micromechanical strength; Monolithic UV-LIGA microfabrication; Nanocrystalline material; Robust microvalve

Abstract

In situ UV-LIGA assembled robust micro check valves with large flow rates (>10 ml/s, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single micro valves to achieve the required flow rates. Test results show that the forward flow rate is about 19 ml/s under pressure of 90Psi. The backward flow rate is negligible. The reliability of the valve is ensured by the valve design and nanostructured nickel realized. The tested tensile strength of a nano structured nickel is about 1 GPa. The strength of SU-8 is 50MPa, which is more than 50% higher that fabricated with a standard process.

Publication Date

1-1-2007

Publication Title

Solid State Phenomena

Volume

121-123

Issue

PART 2

Number of Pages

1207-1210

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.4028/3-908451-30-2.1207

Socpus ID

38549138906 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/38549138906

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