Title

The Saw Properties Of Sputtered Sio2 On X-112°Y Litao3

Abstract

The surface acoustic wave (SAW) propagation properties on the X-cut plate, 112°Y rotated, lithium tantalate (LiTaO3) substrate with and without sputtered SiO2 film layers have been investigated using interdigital transducer electrode structures. Thicknesses of SiO2 of 500 nm and 1000 nm were sputter deposited on the X-112°Y LiTaO3 substrates. A series array of aluminum electrode patterns deposited on the film facilitated the excitation of a wide frequency band of harmonic waves up to 2.0 GHz, and permitted delineation of SAW velocity and propagation loss characteristics for several values of film-thickness to acoustic-wavelength (t/λ) ratio. A resonator pattern at the substrate/film interface, permitted the capacitance ratio (Cm/Co), related to coupling factor, and the temperature coefficient of frequency (TCF) to be measured. A high velocity pseudo-SAW (HVPSAW) mode was observed with a velocity near 6300 m/s.

Publication Date

12-1-2000

Publication Title

Proceedings of the Annual IEEE International Frequency Control Symposium

Number of Pages

218-222

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0034446366 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0034446366

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