Title

Hole Detrapping Effect On Gate Oxide Breakdown Under Dc And Ac Stresses

Abstract

The closed form expressions for time dependent dielectric breakdown (TDDB), were derived for both DC and AC stress conditions, including the hole detrapping effect. It was found that the hole detrapping effect in the unified model can give better prediction for the lifetime of a thin gate oxide. The model predictions were compared with the experimental results.

Publication Date

12-1-2000

Publication Title

International Integrated Reliability Workshop Final Report

Number of Pages

137-140

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0034431221 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0034431221

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