Title

Shrinkage Precompensation Of Holographic Three-Dimensional Photonic-Crystal Templates

Abstract

Quantification and precompensation of photoresist anisotropic shrinkage of the holographic three-dimensional photonic-crystal templates solves the problem of template size reduction and effects the photonic band gap (PBG). During the processing of the of SU-8 photoresist system in holographic lithography, a cationic polymerization reaction takes place that results in a reduction of the free volume of the polymer network, which in turn leads to volume shrinkage. It was required to expose the photoresist to an appropriately spatially elongated interference pattern to precompensate the distortion, which results in a final photoresist crystal with the desired symmetry, after unidirectional shrinkage. Scanning electron microscopy (SEM) of the inner surfaces fabricated by focused-ion beam (FIB) milling was used for the quantification of the effective material shrinkage. A scattering matrix was employed to calculate the transmission and reflection of the samples.

Publication Date

11-17-2006

Publication Title

Advanced Materials

Volume

18

Issue

22

Number of Pages

2964-2968

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1002/adma.200600412

Socpus ID

33845210451 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33845210451

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