Title

Demonstration Of A No-Moving-Parts Axial Scanning Confocal Microscope Using Liquid Crystal Optics

Abstract

For the first time, to the best of authors' knowledge, a no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter liquid crystal (LC) lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 μm range with a measured 3-dB axial resolution of 3.1 μm using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide (InP) twin square optical waveguide sample with a 10.2 μm waveguide pitch and 2.3 μm height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three-dimensional (3D) imaging and profiling applications. © 2006 Elsevier B.V. All rights reserved.

Publication Date

9-15-2006

Publication Title

Optics Communications

Volume

265

Issue

2

Number of Pages

461-467

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.optcom.2006.03.068

Socpus ID

33748194188 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33748194188

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