Title

High-Temperature Lithium Metal-Vapor Capillary Discharge Extreme-Ultraviolet Source At 13.5 Nm

Abstract

We describe a high-temperature lithium extreme-ultraviolet (EUV) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725 °C, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2π sr)/pulse at 13.5 nm. © 2000 Optical Society of America.

Publication Date

7-20-2000

Publication Title

Applied Optics

Volume

39

Issue

21

Number of Pages

3678-3682

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.39.003678

Socpus ID

0000560775 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0000560775

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