Title

A Novel Design And Analysis Of A Mems Ceramic Hot-Wire Anemometer For High Temperature Applications

Abstract

This paper attempts to prove the feasibility of high temperature MEMS hot-wire anemometer for gas turbine environment. No such sensor exists at present. Based on the latest improvement in a new type of Polymer-Derived Ceramic (PDC) material, the authors present a Novel design, structural and thermal analysis of MEMS hot-wire anemometer (HWA) based on PDC material, and show that such a sensor is indeed feasible. This MEMS Sensor is microfabricated by using three types of PDC materials such as SiAlCN, SiCN (lightly doped) and SiCN (heavily doped) for sensing element (hot-wire), support prongs and connecting leads respectively. This novel hot wire anemometer can perform better than a conventional HWA in which the hot wire is made of tungsten or platinum-iridium. This type of PDC-HWA can be used in harsh environment due to its high temperature resistance, tensile strength and resistance to oxidation. This HWA is fabricated using microstereolithography as a novel microfabrication technique to manufacture the proposed MEMS Sensor. © 2006 IOP Publishing Ltd.

Publication Date

4-1-2006

Publication Title

Journal of Physics: Conference Series

Volume

34

Issue

1

Number of Pages

277-282

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/1742-6596/34/1/046

Socpus ID

33744509037 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33744509037

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