Title

Solid Micromechanical Valves Fabricated With In Situ Uv-Liga Assembled Nickel

Keywords

In situ UV-LIGA assemble; Robust microvalve; Solid nickel

Abstract

In situ UV-LIGA assembled robust microcheck valves with large flow rates (>10 ml/s, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single microvalves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Test results show that the forward flow rate is about 19 ml/s under pressure of 90 psi. The backward flow rate is negligible. The loading/unloading test results show that the flow rates were repeated very well over a large range of tested pressure differences. The reliability of the valve is ensured by the low stress valve design and the robust nano-structured nickel material fabricated. © 2005 Elsevier B.V. All rights reserved.

Publication Date

1-26-2006

Publication Title

Sensors and Actuators, A: Physical

Volume

126

Issue

1

Number of Pages

187-193

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.sna.2005.10.009

Socpus ID

31144438660 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/31144438660

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