Title

Effect Of Two- And Three-Zone Phase Masks On The Axial And Transverse Intensity Distribution Under High Numerical Aperture Focusing

Keywords

Annular multi-phase plate; Diffractive optical elements; Multi-photon three-dimensional microfabrication; Photolithography; Point-spread-function; Super-resolution

Abstract

Vector diffraction theory was applied to study computationally the effect of two and three-zone annular multi-phase plates (AMPs) on the three-dimensional point-spread-function (PSF). The two- and four-dimensional solutions spaces associated with a two- and three-zone AMP, respectively, were discretized and the PSF was calculated using the Wolf diffraction integrals for each unique combination of zone radius and relative phase. Conditions are identified in which a three-zone AMP generates an intensity distribution that is super-resolved by 19% in the axial direction with minimal change in the transverse distribution and sufficiently small axial side-lobes that this intensity pattern could be used for advanced photolithographic techniques, such as multi-photon three-dimensional microfabrication.

Publication Date

5-3-2006

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

6110

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.647618

Socpus ID

33646069961 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33646069961

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